Correlation between plasma parameters and structure of thin TiO2 films deposited by conventional and pulsed magnetron sputtering methods - ScienceDirect
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Influence of discharge power on the size of the Pd cluster generated with a magnetron plasma gas aggregation cluster source - ScienceDirect
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TiO2 coating fabrication using gas injection magnetron sputtering technique by independently controlling the gas and power pulses - ScienceDirect
Reactive Gas Sputtering
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Magnetron-sputtered copper nanoparticles: lost in gas aggregation and found by in situ X-ray scattering - Nanoscale (RSC Publishing)
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Magnetron sputtering
